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40215H
Honeywell
Hexamethyldisilazane
SKU
40215H
Semiconductor grade (Honeywell 17713)
Synonym(s)
Bis(trimethylsilyl)amine; HMDS
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| Brand Honeywell | CAS Numbers (All) | EC Number | Synonyms Bis(trimethylsilyl)amine; HMDS |
Documents
Specifications
| Property | Value |
|---|---|
| Assay (GC) | Min. 98 % |
| Density (D 20/4) | 0.770 - 0.775 |
| Refractive index (n 20/D) | 1.4070 - 1.4090 |
| Non-volatile matter | Max. 5 ppm |
| Aluminium (Al) | Max. 0.1 ppm |
| Arsenic, antimony (as As) | Max. 0.01 ppm |
| Calcium (Ca) | Max. 0.1 ppm |
| Copper (Cu) | Max. 0.1 ppm |
| Iron (Fe) | Max. 0.1 ppm |
| Sodium (Na) | Max. 0.5 ppm |
| Lead (Pb) | Max. 0.05 ppm |
| Zinc (Zn) | Max. 0.1 ppm |
| Chloride (Cl) | Max. 5 ppm |
Properties
| Property | Value |
|---|---|
| Boiling Point/Range | 126 °C (1.013 hPa) |
| Color | Colorless |
| Density | 0.770-0.775 g/cm3 (20 °C) |
| Flashpoint | 25.9 %(V) |
| Form | Liquid |
| Grade | Semiconductor Grade |
| Incompatible Materials | Water, Incompatible with oxidizing agents, Acids |
| Lower Explosion Limit | 0.8 %(V) |
| Melting Point/Range | -80 °C |
| Partition Coefficient | No data available |
| Solubility in Water | Reacts violently with water. |
| Upper Explosion Limit | 25.9 %(V) |
| Vapor Pressure | 100 hPa (50 °C) |
| pH-Value | Not applicable |
| Storage Temperature | Ambient |
Safety Information
| Property | Value |
|---|---|
| Hazard Class | 3 |
| Package Group | II |
| UN ID | UN3286 |
